Agarwal, SumitCiobanu, Cristian V.Jariwala, Bhavin N.2023-09-052023-09-052011https://hdl.handle.net/11124/177934Includes bibliographical references (pages 144-155).doctoral dissertationsengCopyright of the original work is retained by the author.Nanostructured materialsSemiconductorsSilicon -- Electric propertiesSurface chemistryGas-surface interactions during synthesis and passivation of group IV nanostructuresText