Reimanis, Ivar E. (Ivar Edmund)Zazzara, Gregory2022-08-232022-08-231997https://hdl.handle.net/11124/15027Includes bibliographical references (pages 59-61).masters thesesengCopyright of the original work is retained by the author.Thin films -- DefectsThin films -- Defects -- Mathematical modelsSputtering (Physics)Text