Mishra, BrajendraMoore, J. J. (John Jeremy), 1944-Dennis, Darcie L.2023-08-072023-08-072003https://hdl.handle.net/11124/177648Includes bibliographical references (pages 157-169).doctoral dissertationsengCopyright of the original work is retained by the author.Thin films -- Mechanical propertiesThin films -- FormabilityDiamond bitsVapor-platingBoron nitrideCharacterization modeling of the flow through ion gun: applications to nitride processingText