Wolden, Colin AndrewRobbins, Joshua2023-08-072023-08-072003https://hdl.handle.net/11124/177656Includes bibliographical references (pages 150-159).doctoral dissertationsengCopyright of the original work is retained by the author.Plasma-enhanced chemical vapor depositionOxides -- Electric propertiesThin films -- Electric propertiesDevelopment and analysis of plasma enhanced chemical vapor deposition of transparent conducting oxidesText