Agarwal, Sumit.Rai, Vikrant R.2023-09-052023-09-052011https://hdl.handle.net/11124/177936Includes bibliographical references (pages 123-133).doctoral dissertationsengCopyright of the original work is retained by the author.Gas-solid interfacesMonomolecular filmsPhotoreactive organic thin filmsSurface chemistryInvestigation of gas-surface interactions during atomic layer depositionText