Wolden, Colin AndrewPatel, Rakhi P.2023-08-302023-08-302012https://hdl.handle.net/11124/177916Includes bibliographical references (pages 118-128).doctoral dissertationsengCopyright of the original work is retained by the author.Plasma-enhanced chemical vapor depositionCeramic to metal bondingPulsed plasma-enhanced chemical vapor deposition of hybrid organic-inorganic nanolaminatesText