Shear thickening and defect formation in chemical mechanical polishing slurries
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Shear thickening and defect ...
Advisor
Liberatore, Matthew W.Williams, S. Kim R.
Date issued
2013Keywords
shear thickeningrheology
high shear
fumed silica
chemical mechanical polishing
agglomeration
Chemical mechanical planarization
Slurry
Agglomeration
Rheology