In-situ atom probe specimen preparation with a planar region of interest
Name:
Allen_mines_0052N_10186.pdf
Size:
6.277Mb
Format:
PDF
Description:
In-situ atom probe specimen ...
Advisor
Gorman, Brian P.Date issued
2013Keywords
quantum computingfocused ion beam
delta-doped
atom probe
2DEG
Solid state electronics
Logic devices
Ion bombardment
Tomography