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dc.contributor.advisorAgarwal, Sumit.
dc.contributor.authorRai, Vikrant R.
dc.date.accessioned2023-09-05T21:00:31Z
dc.date.available2023-09-05T21:00:31Z
dc.date.issued2011
dc.identifierT 6847
dc.identifier.urihttps://hdl.handle.net/11124/177936
dc.descriptionIncludes bibliographical references (pages 123-133).
dc.format.mediumdoctoral dissertations
dc.languageEnglish
dc.language.isoeng
dc.publisherColorado School of Mines. Arthur Lakes Library
dc.relation.ispartof2010-2019 - Mines Theses & Dissertations
dc.rightsCopyright of the original work is retained by the author.
dc.subject.lcshGas-solid interfaces
dc.subject.lcshMonomolecular films
dc.subject.lcshPhotoreactive organic thin films
dc.subject.lcshSurface chemistry
dc.titleInvestigation of gas-surface interactions during atomic layer deposition
dc.typeText
thesis.degree.nameDoctor of Philosophy (Ph.D.)
thesis.degree.levelDoctoral
thesis.degree.disciplineChemical Engineering
thesis.degree.grantorColorado School of Mines


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