Patterning by light: the engineering of integrated circuits: a module developed for hands-on learning
Author
Blagg, KirstenLiu, Yinan
Schenken, William
Moskal, Barbara M.
Singh, Meenakshi
Koh, Carolyn A.
Collins, Reuben T.
Colorado School of Mines
Date
2019-06Keywords
patternsIntegrated circuits
Electronics
Chemical reactions
Lithography
Physics -- Study and teaching