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dc.contributor.advisorVincent, Tyrone
dc.contributor.authorZagrodzki, Maciej
dc.date.accessioned2023-02-06T20:02:13Z
dc.date.available2023-02-06T20:02:13Z
dc.date.issued2011
dc.identifierT 6958
dc.identifier.urihttps://hdl.handle.net/11124/16309
dc.descriptionIncludes bibliographical references (pages 57-59).
dc.format.mediummasters theses
dc.languageEnglish
dc.language.isoeng
dc.publisherColorado School of Mines. Arthur Lakes Library
dc.relation.ispartof2010-2019 - Mines Theses & Dissertations
dc.rightsCopyright of the original work is retained by the author.
dc.subject.lcshChemical vapor deposition
dc.subject.lcshEmission spectroscopy
dc.subject.lcshSputtering (Physics)
dc.subject.lcshThin films
dc.subject.lcshTungsten oxides
dc.titleControl of sputter deposition of tungsten oxide using optical emission spectroscopy
dc.typeText
thesis.degree.nameMaster of Science (M.S.)
thesis.degree.levelMasters
thesis.degree.disciplineEngineering
thesis.degree.grantorColorado School of Mines


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