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dc.contributor.advisorReimanis, Ivar E. (Ivar Edmund)
dc.contributor.authorZazzara, Gregory
dc.date.accessioned2022-08-23T20:15:29Z
dc.date.available2022-08-23T20:15:29Z
dc.date.issued1997
dc.identifierT 5067
dc.identifier.urihttp://hdl.handle.net/11124/15027
dc.descriptionIncludes bibliographical references (pages 59-61).
dc.format.mediummasters theses
dc.languageEnglish
dc.language.isoeng
dc.publisherColorado School of Mines. Arthur Lakes Library
dc.relation.ispartof1990-1999 - Mines Theses & Dissertations
dc.rightsCopyright of the original work is retained by the author.
dc.subject.lcshThin films -- Defects
dc.subject.lcshThin films -- Defects -- Mathematical models
dc.subject.lcshSputtering (Physics)
dc.titleSputtered tungsten films: stresses and performance
dc.typeText
thesis.degree.nameMaster of Science (M.S.)
thesis.degree.levelMasters
thesis.degree.disciplineMetallurgical and Materials Engineering
thesis.degree.grantorColorado School of Mines


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