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Abatement of hexafluoroethane (C₂F₆) gas by molten aluminum, The

Termsuksawad, Preecha
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Mishra, Brajendra
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Date
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1998
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Keywords
Greenhouse gas mitigation
 Semiconductor industry
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1990-1999 - Mines Theses & Dissertations
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Termsuksawad_10794396.pdf
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https://hdl.handle.net/11124/15100
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